US Patent No: 5,349,492

Number of patents in Portfolio can not be more than 2000

Capacitive pressure sensor

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Importance

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Abstract

A capacitive pressure sensor includes first and second substrates, a groove, and first and second electrodes. The first substrate consists of an electrical insulating material. The second substrate consists of the same material as that for the first substrate and has a peripheral portion directly bonded to the first substrate. The groove is formed in a central portion of the surface of one of the first and second substrates. The first and second substrates oppose each other through the groove. The first electrode is coupled to a surface, of the first substrate, which opposes the second substrate so as to be movable together with the first substrate. The second electrode is arranged on a surface, of the second substrate, which opposes the first substrate so as to be parallel to the first electrode. The first and second substrate may consist of quartz glass or sapphire. The first and second substrates are bonded to each other at a temperature lower than the melting point of the substrate material without forming any bonding layer.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
YAMATAKE-HONEYWELL CO., LTD.TOKYO94

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishikura, Yoshiyuki Tokyo, JP 29 152
Kihara, Takashi Chiba, JP 47 231
Kimura, Shigeo Kawasaki, JP 70 792
Kuroiwa, Takaaki Tokyo, JP 15 136
Masuda, Takashi Suwa, JP 153 741

Cited Art

Patent Info (Count) # Cites Year
 
NGK SPARK PLUG CO., LTD. (1)
5,201,228 Pressure sensor 26 1991
 
ROBERT BOSCH GMBH (1)
4,410,872 Electrical thick-film, free-standing, self-supporting structure, and method of its manufacture, particularly for sensors used with internal combustion engines 22 1980
 
ROSEMOUNT INC. (1)
4,572,000 Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm 56 1983
 
TEXAS INSTRUMENTS INCORPORATED (1)
4,972,717 Pressure transducer apparatus and method for making same 19 1989

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
ROSEMOUNT INC. (16)
5,483,834 Suspended diaphragm pressure sensor 28 1993
5,637,802 Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates 94 1995
5,524,492 Pressure transmitter isolation diaphragm 57 1995
5,665,899 Pressure sensor diagnostics in a process transmitter 97 1996
6,089,097 Elongated pressure sensor for a pressure transmitter 25 1997
5,731,522 Transmitter with isolation assembly for pressure sensor 43 1997
5,808,205 Eccentric capacitive pressure sensor 11 1997
6,082,199 Pressure sensor cavity etched with hot POCL.sub.3 gas 3 1999
6,079,276 Sintered pressure sensor for a pressure transmitter 30 1999
6,520,020 Method and apparatus for a direct bonded isolated pressure sensor 17 2000
6,508,129 Pressure sensor capsule with improved isolation 10 2000
6,505,516 Capacitive pressure sensing with moving dielectric 4 2000
6,484,585 Pressure sensor for a pressure transmitter 48 2000
6,516,671 Grain growth of electrical interconnection for microelectromechanical systems (MEMS) 18 2001
6,561,038 Sensor with fluid isolation barrier 9 2001
6,848,316 Pressure sensor assembly 2 2002
 
MKS INSTRUMENTS, INC. (9)
5,965,821 Pressure sensor 57 1997
6,993,973 Contaminant deposition control baffle for a capacitive pressure transducer 3 2003
7,201,057 High-temperature reduced size manometer 2 2004
7,141,447 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 1 2004
7,284,439 Method for producing a pressure sensor for detecting small pressure differences and low pressures 2 2004
7,204,150 Turbo sump for use with capacitive pressure sensor 1 2005
7,389,697 Pressure sensor for detecting small pressure differences and low pressures 0 2005
7,624,643 Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor 1 2006
7,316,163 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 3 2006
 
ROCHESTER INSTITUTE OF TECHNOLOGY (4)
7,280,014 Micro-electro-mechanical switch and a method of using and making thereof 8 2002
7,195,393 Micro fluidic valves, agitators, and pumps and methods thereof 8 2002
7,287,328 Methods for distributed electrode injection 4 2004
7,217,582 Method for non-damaging charge injection and a system thereof 15 2004
 
ALLIEDSIGNAL INC. (3)
6,058,780 Capacitive pressure sensor housing having a ceramic base 13 1997
6,324,914 Pressure sensor support base with cavity 10 1999
6,387,318 Glass-ceramic pressure sensor support base and its fabrication 1 1999
 
NT INTERNATIONAL, INC. (3)
5,672,832 Chemically inert flow meter within caustic fluids having non-contaminating body 45 1996
6,578,435 Chemically inert flow control with non-contaminating body 21 1999
6,612,175 Sensor usable in ultra pure and highly corrosive environments 14 2000
 
NTH TECH CORPORATION (3)
6,688,179 Electrostatic pressure transducer and a method thereof 10 2002
7,211,923 Rotational motion based, electrostatic power source and methods thereof 7 2003
7,378,775 Motion based, electrostatic power source and methods thereof 1 2003
 
KAVLICO CORPORATION (2)
5,578,843 Semiconductor sensor with a fusion bonded flexible structure 37 1994
5,966,617 Multiple local oxidation for surface micromachining 9 1996
 
YAMATAKE CORPORATION (2)
6,311,563 Pressure sensor 9 1999
6,904,808 Pressure sensor and method for manufacturing pressure sensor 1 2001
 
COMMISSARIAT A L'ENERGIE ATOMIQUE (1)
6,431,005 Microsystem with a flexible membrane pressure sensor 12 1998
 
ENDRESS + HAUSER GMBH + CO. KG (1)
6,252,759 Capacitive pressure sensors or capacitive differential pressure sensors 9 1995
 
ENTEGRIS, INC. (1)
7,152,478 Sensor usable in ultra pure and highly corrosive environments 8 2003
 
ENVEC MESS- UND REGELTECHNIK GMBH + CO. (1)
5,954,900 Process for joining alumina ceramic bodies 12 1997
 
FREESCALE SEMICONDUCTOR, INC. (1)
6,426,239 Method of manufacturing a semiconductor component having a fixed electrode between two flexible diaphragms 17 2000
 
HONEYWELL INTERNATIONAL INC. (1)
7,691,723 Bonding system having stress control 0 2005
 
MICRO MACHINES, INC. (1)
5,576,251 Process for making a semiconductor sensor with a fusion bonded flexible structure 28 1995
 
MICRONAS GMBH (1)
6,425,289 Capacitive sensor 4 1999
 
MICRONAS INTERMETALL GMBH (1)
6,370,960 Capacitive sensor 2 1999
 
NTH TECH (1)
7,408,236 Method for non-damaging charge injection and system thereof 0 2007
 
ROBERT BOSCH GMBH (1)
5,776,276 Method for producing a pressure sensor 6 1996
 
ROSEMOUNT AEROSPACE INC. (1)
8,141,429 High temperature capacitive static/dynamic pressure sensors and methods of making the same 0 2010
 
TEXAS INSTRUMENTS INCORPORATED (1)
5,525,280 Method of making a pressure transducer apparatus 17 1994
 
VAISALA OY (1)
5,656,781 Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers 6 1996