Cleaning device for cleaning planar workpiece
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United States of America Patent
Stats
-
Sep 27, 1994
Grant Date -
N/A
app pub date -
Jun 4, 1993
filing date -
Jun 4, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A cleaning device has a pair of diametrically opposite nozzles spaced across a rotatable chuck from each other for alternately applying a cleaning solution to the reverse side of a workpiece. The rotatable chuck with the workpiece held thereon is rotated by a reversible motor alternatively in opposite directions such that the cleaning solution is ejected from one of the nozzles while the rotatable chuck is being rotated in one of the opposite directions by the reversible motor, and the cleaning solution is ejected from the other of the nozzles while the rotatable chuck is being rotated in the other of the opposite directions by the reversible motor. The nozzles have respective axes along which the cleaning solution is ejected, the axes extending symmetrically with respect to a line passing through the center of the rotatable chuck perpendicularly to a line connecting the pair of nozzles.
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Cited Art Landscape
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