Lighting device

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United States of America Patent

PATENT NO 5351169
SERIAL NO

08051618

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Abstract

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A lighting device capable of lighting a surface of an observed section of a specimen sample so as to permit an object of observation of the surface to be satisfied even when the surface has relatively fine unevenness. Any one of light field illumination mainly using vertically projected light, dark field illumination mainly using laterally projected light and a combination thereof is selectively carried out with respect to the surface of the specimen sample as desired, to thereby selectively provide a lighted two-dimensional image of the surface and its lighted three-dimensional image as desired.

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Patent Owner(s)

Patent OwnerAddress
SCALAR CORPORATION22-2 NISHI-SHINJUKU-KU 1-CHOME SHINJUKU-KU TOKYO 160-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishikawa, Seiji Chigasaki, JP 87 1189
Murakami, Hajime Chigasaki, JP 87 1341

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