Method and apparatus for maintaining clean articles
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United States of America Patent
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Oct 4, 1994
Grant Date -
N/A
app pub date -
May 18, 1992
filing date -
May 18, 1992
priority date (Note) -
In Force
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Importance
Abstract
A method, system and apparatus for maintaining articles to be processed clean, having an airtight transportable container with an inlet valve for admitting ionized gas and an outlet valve for venting gas, a purger with an interface to the container inlet valve and a vacuum pick-up and ionized gas spray wand is disclosed. A purger rack for storing multiple containers is also disclosed.
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