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Abstract

A membrane filter integrity test system includes a large volume mass-flow controller for rapidly supplying a larger amount of fluid to a primary side of a membrane filter under test, a small volume mass-flow controller for supplying a relatively small amount of fluid to the primary side of the membrane filter. The operation of the large volume mass-flow controller is stopped when the pressure at the primary side of said membrane filter reaches a predetermined level. This predetermined pressure is detected by a pressure sensor which senses the pressure at the primary side of the membrane filter. The pressure sensor responsively generates a detection signal corresponding to the sensed pressure at the primary side of the membrane filter. A main controller responsive to the detection signal from the pressure sensor controls the small volume mass-flow controller in a negative feedback loop manner for controlling the supply of fluid to the primary side of the membrane filter so that the pressure on the primary side of the filter is maintained at the predetermined value.

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