Pressure sensor
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United States of America Patent
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-
Oct 11, 1994
Grant Date -
N/A
app pub date -
Dec 15, 1992
filing date -
Dec 16, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
To compensate for temperature effects on the measuring signal of a pressure sensor which includes a membrane part with at least indirect signal generation and is a supporting base, the membrane part being deformed by the pressure to be measured and cooperable with a pressure sensing element, the the membrane part is constructed to include at least one pair of concentric cylindrical surfaces positioned at a small radial distance from each other. The cylindrical surfaces are closed along their circumference, and one of the cylindrical surfaces increases its diameter when subjected to pressure and the diameter of the other decreases. Changes of the two diameters in the same direction take place in the instance of a temperature change.
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