Light modulated detection system for atomic force microscopes
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United States of America Patent
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Oct 18, 1994
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N/A
app pub date -
Nov 9, 1993
filing date -
Nov 9, 1993
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Abstract
A scanning force microscope is provided with apparatus to modify the light source with a modulation scheme. Information relative to scanning tip motion is included in a modulated light beam which is then demodulated and filtered to recover the information in the form of a signal which corresponds to and is representative of a chosen parameter of tip motion.
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