Method of protecting aluminum nitride circuit substrates during electroless plating using sol-gel oxide films and article made therefrom

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United States of America Patent

PATENT NO 5358597
SERIAL NO

08103997

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Abstract

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The present invention describes a process for protecting aluminum nitride circuit substrates during electroless plating using a sol-gel technique. The aluminum nitride substrate is coated with a metal. The coated substrate is etched to form a circuit pattern thereby exposing the aluminum nitride. The etched substrate is placed in a solution of tetraethylorthosilicate and withdrawn. The substrate is dried in air and then baked in an oven to remove all of the organic solvents leaving a stoichio metric film of silica on the exposed substrate. The substrate is then placed in an electroless plating solution and the circuit pattern is plated to a predetermined thickness.

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  • GTE LABORATORIES INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hazen, Brian J Framingham, MA 3 10
Smith, Sandra L Georgetown, MA 11 111

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