US Patent No: 5,358,601

Number of patents in Portfolio can not be more than 2000

Process for isotropically etching semiconductor devices

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Abstract

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The etchant material of this invention comprises a chemical etchant composition including a halogen-containing feed gas and gaseous carbon dioxide. Typically, the halogen-containing feed gas is a fluorine-containing or a chlorine-containing feed gas, or both a fluorine-containing and a chlorine-containing feed gas. Preferably, the chlorine-containing feed gas comprises chlorine gas or HCl, and the fluorine-containing feed gas comprises SF.sub.6 or NF.sub.3. The fluorine-containing feed gas can also comprise CF.sub.4, or C2F.sub.6.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MICRON TECHNOLOGY, INC.BOISE, ID19262

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cathey, David A Boise, ID 159 3849

Cited Art Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (4)
* 4,726,879 RIE process for etching silicon isolation trenches and polycides with vertical surfaces 52 1986
* 4,734,157 Selective and anisotropic dry etching 35 1987
* 4,836,886 Binary chlorofluorocarbon chemistry for plasma etching 13 1987
* 4,836,887 Chlorofluorocarbon additives for enhancing etch rates in fluorinated halocarbon/oxidant plasmas 22 1987
 
ADVANCED MICRO DEVICES, INC. (1)
* 4,468,285 Plasma etch process for single-crystal silicon with improved selectivity to silicon dioxide 19 1983
 
Micron Technology, Inc. (1)
* 5,110,411 Method of isotropically dry etching a poly/WSi.sub.x sandwich structure 24 1990
 
APPLIED MATERIALS, INC. (1)
* 4,778,563 Materials and methods for etching tungsten polycides using silicide as a mask 34 1987
 
Texas Instruments Incorporated (2)
* 4,659,426 Plasma etching of refractory metals and their silicides 26 1985
* 4,855,017 Trench etch process for a single-wafer RIE dry etch reactor 171 1988
 
EATON CORPORATION (1)
* 4,255,230 Plasma etching process 26 1980
 
LEYBOLD AKTIENGESELLSCHAFT (1)
* 4,863,549 Apparatus for coating or etching by means of a plasma 71 1988
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
6,403,412 Method for in-situ formation of bottle shaped trench by gas phase etching 12 1999
 
Other [Check patent profile for assignment information] (1)
6,787,054 Two-stage etching process 10 2003
 
ETALON, INC. (1)
* 2003/0072,070 Visible spectrum modulator arrays 288 2002
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 83 2004
 
Micron Technology, Inc. (19)
* 5,916,004 Photolithographically produced flat panel display surface plate support structure 7 1996
* 5,866,979 Method for preventing junction leakage in field emission displays 33 1997
* 5,975,975 Apparatus and method for stabilization of threshold voltage in field emission displays 21 1997
6,417,605 Method of preventing junction leakage in field emission devices 7 1998
* 6,020,683 Method of preventing junction leakage in field emission displays 21 1998
6,186,850 Method of preventing junction leakage in field emission displays 9 1999
6,398,608 Method of preventing junction leakage in field emission displays 6 2000
6,676,471 Method of preventing junction leakage in field emission displays 0 2002
6,987,352 Method of preventing junction leakage in field emission devices 1 2002
6,712,664 Process of preventing junction leakage in field emission devices 1 2002
6,934,928 Method and apparatus for designing a pattern on a semiconductor surface 9 2002
6,898,779 Pattern generation on a semiconductor surface 4 2002
6,860,777 Radiation shielding for field emitters 0 2002
* 2003/0057,861 Radiation shielding for field emitters 4 2002
7,098,587 Preventing junction leakage in field emission devices 3 2003
7,370,306 Method and apparatus for designing a pattern on a semiconductor surface 1 2004
7,290,242 Pattern generation on a semiconductor surface 1 2005
7,629,736 Method and device for preventing junction leakage in field emission devices 0 2005
7,268,482 Preventing junction leakage in field emission devices 0 2006
 
QUALCOMM MEMS TECHNOLOGIES, INC. (131)
7,123,216 Photonic MEMS and structures 612 1999
7,138,984 Directly laminated touch sensitive screen 134 2001
6,867,896 Interferometric modulation of radiation 436 2001
6,680,792 Interferometric modulation of radiation 605 2001
6,710,908 Controlling micro-electro-mechanical cavities 425 2002
7,042,643 Interferometric modulation of radiation 218 2002
7,126,738 Visible spectrum modulator arrays 175 2002
* 2006/0139,723 VISIBLE SPECTRUM MODULATOR ARRAYS 0 2002
7,110,158 Photonic MEMS and structures 204 2002
* 2003/0043,157 Photonic MEMS and structures 54 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 47 2002
7,297,471 Method for manufacturing an array of interferometric modulators 27 2003
7,460,291 Separable modulator 70 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 167 2003
7,692,844 Interferometric modulation of radiation 42 2004
7,532,194 Driver voltage adjuster 6 2004
7,119,945 Altering temporal response of microelectromechanical elements 154 2004
* 2005/0195,467 Altering temporal response of microelectromechanical elements 25 2004
7,706,050 Integrated modulator illumination 42 2004
7,476,327 Method of manufacture for microelectromechanical devices 55 2004
7,280,265 Interferometric modulation of radiation 50 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 57 2004
7,893,919 Display region architectures 21 2005
7,813,026 System and method of reducing color shift in a display 22 2005
7,379,227 Method and device for modulating light 20 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 52 2005
7,289,259 Conductive bus structure for interferometric modulator array 83 2005
7,460,246 Method and system for sensing light using interferometric elements 14 2005
7,012,732 Method and device for modulating light with a time-varying signal 85 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 13 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,920,135 Method and system for driving a bi-stable display 13 2005
7,586,484 Controller and driver features for bi-stable display 25 2005
7,535,466 System with server based control of client device display features 22 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 65 2005
* 2006/0176,241 System and method of transmitting video data 32 2005
7,321,456 Method and device for corner interferometric modulation 61 2005
7,372,613 Method and device for multistate interferometric light modulation 91 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 67 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 5 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 57 2005
7,547,565 Method of manufacturing optical interference color display 21 2005
7,527,995 Method of making prestructure for MEMS systems 45 2005
7,808,703 System and method for implementation of interferometric modulator displays 6 2005
7,349,136 Method and device for a display having transparent components integrated therein 10 2005
RE42119 Microelectrochemical systems device and method for fabricating same 14 2005
8,008,736 Analog interferometric modulator device 11 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 41 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 84 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 7 2005
7,417,783 Mirror and mirror layer for optical modulator and method 10 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 18 2005
7,304,784 Reflective display device having viewable display on both sides 62 2005
* 2006/0077,519 System and method for providing thermal compensation for an interferometric modulator display 2 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 46 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 14 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 4 2005
7,492,502 Method of fabricating a free-standing microstructure 13 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 23 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 33 2005
7,564,612 Photonic MEMS and structures 91 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 239 2005
7,369,294 Ornamental display device 59 2005
7,684,104 MEMS using filler material and method 17 2005
7,653,371 Selectable capacitance circuit 29 2005
7,485,236 Interference display cell and fabrication method thereof 12 2005
7,236,284 Photonic MEMS and structures 111 2005
7,630,114 Diffusion barrier layer for MEMS devices 8 2005
8,014,059 System and method for charge control in a MEMS device 6 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 6 2005
7,916,980 Interconnect structure for MEMS device 10 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 15 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 3 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 9 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 46 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 58 2006
7,483,197 Photonic MEMS and structures 26 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 14 2006
* 2006/0256,420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 29 2006
7,532,377 Movable micro-electromechanical device 58 2006
7,643,203 Interferometric optical display system with broadband characteristics 34 2006
7,903,047 Mode indicator for interferometric modulator displays 4 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 14 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 18 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 13 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 63 2006
* 2007/0247,696 Microelectromechanical device and method utilizing a porous surface 4 2006
* 2007/0247,401 Microelectromechanical device and method utilizing nanoparticles 43 2006
7,706,044 Optical interference display cell and method of making the same 12 2006
* 2006/0257,070 Optical interference display cell and method of making the same 20 2006
7,880,954 Integrated modulator illumination 25 2006
7,369,292 Electrode and interconnect materials for MEMS devices 24 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 28 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 101 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 31 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 15 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 88 2006
* 2007/0279,730 PROCESS AND STRUCTURE FOR FABRICATION OF MEMS DEVICE HAVING ISOLATED EGDE POSTS 12 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 12 2006
7,835,061 Support structures for free-standing electromechanical devices 17 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 60 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 19 2006
7,534,640 Support structure for MEMS device and methods therefor 22 2006
7,830,586 Transparent thin films 33 2006
7,554,711 MEMS devices with stiction bumps 64 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 9 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 47 2006
8,059,326 Display devices comprising of interferometric modulator and sensor 15 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 24 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 16 2007
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
7,719,754 Multi-thickness layers for MEMS and mask-saving sequence for same 6 2008
* 2009/0218,312 METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY 6 2009
7,906,353 Method of fabricating interferometric devices using lift-off processing techniques 0 2009
* 2009/0262,412 METHOD OF FABRICATING INTERFEROMETRIC DEVICES USING LIFT-OFF PROCESSING TECHNIQUES 1 2009
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,928,967 Method and device for modulating light 1 2010
9,110,289 Device for modulating light with multiple electrodes 1 2011
8,971,675 Interconnect structure for MEMS device 0 2011
9,134,527 Pixel via and methods of forming the same 0 2011
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,970,939 Method and device for multistate interferometric light modulation 0 2012
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 2 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
9,001,412 Electromechanical device with optical function separated from mechanical and electrical function 0 2012
8,885,244 Display device 0 2013
9,086,564 Conductive bus structure for interferometric modulator array 0 2013
9,097,885 Device having a conductive light absorbing mask and method for fabricating same 0 2014
 
IRIDIGM DISPLAY CORPORATION (2)
* 2005/0213,183 VISIBLE SPECTRUM MODULATOR ARRAYS 41 2002
7,256,922 Interferometric modulators with thin film transistors 44 2004
 
CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (2)
6,225,202 Selective etching of unreacted nickel after salicidation 7 2000
6,479,383 Method for selective removal of unreacted metal after silicidation 4 2002
 
APPLIED MATERIALS, INC. (23)
* 5,851,926 Method for etching transistor gates using a hardmask 13 1996
* 5,866,483 Method for anisotropically etching tungsten using SF.sub.6, CHF.sub.3, and N.sub.2 69 1997
* 6,136,211 Self-cleaning etch process 83 1997
6,322,714 Process for etching silicon-containing material on substrates 20 1998
6,312,616 Plasma etching of polysilicon using fluorinated gas mixtures 12 1998
6,235,214 Plasma etching of silicon using fluorinated gas mixtures 25 1999
6,583,063 Plasma etching of silicon using fluorinated gas mixtures 39 1999
6,872,322 Multiple stage process for cleaning process chambers 21 1999
6,221,784 Method and apparatus for sequentially etching a wafer using anisotropic and isotropic etching 11 1999
6,797,188 Self-cleaning process for etching silicon-containing material 11 2000
6,527,968 Two-stage self-cleaning silicon etch process 88 2000
6,391,790 Method and apparatus for etching photomasks 9 2000
6,699,399 Self-cleaning etch process 9 2000
6,905,800 Etching a substrate in a process zone 18 2000
7,183,201 Selective etching of organosilicate films over silicon oxide stop etch layers 0 2001
6,534,417 Method and apparatus for etching photomasks 3 2002
* 2003/0173,333 Two-stage etching process 83 2003
7,115,523 Method and apparatus for etching photomasks 1 2003
* 2004/0072,081 Methods for etching photolithographic reticles 23 2003
8,293,430 Method for etching a molybdenum layer suitable for photomask fabrication 1 2005
* 2006/0166,108 Method for etching a molybdenum layer suitable for photomask fabrication 10 2005
7,244,672 Selective etching of organosilicate films over silicon oxide stop etch layers 23 2005
* 2005/0255,697 Selective etching of organosilicate films over silicon oxide stop etch layers 1 2005
 
QUANTUM GLOBAL TECHNOLOGIES LLC (1)
8,118,946 Cleaning process residues from substrate processing chamber components 0 2007
 
KABUSHIKI KAISHA TOSHIBA (1)
* 5,874,363 Polycide etching with HCL and chlorine 20 1996
 
UCHICAGO ARGONNE, LCC (2)
* 9,153,453 Technique for etching monolayer and multilayer materials 0 2012
* 2012/0205,785 Technique for Etching Monolayer and Multilayer Materials 1 2012
 
CENTOCOR ORTHO BIOTECH INC. (2)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 30 2004
* 2005/0078,348 Structure of a micro electro mechanical system and the manufacturing method thereof 23 2004
 
Brewer Science Inc. (1)
8,877,430 Methods of producing structures using a developer-soluble layer with multilayer technology 0 2011
* Cited By Examiner