US Patent No: 5,358,601

Number of patents in Portfolio can not be more than 2000

Process for isotropically etching semiconductor devices

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Abstract

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The etchant material of this invention comprises a chemical etchant composition including a halogen-containing feed gas and gaseous carbon dioxide. Typically, the halogen-containing feed gas is a fluorine-containing or a chlorine-containing feed gas, or both a fluorine-containing and a chlorine-containing feed gas. Preferably, the chlorine-containing feed gas comprises chlorine gas or HCl, and the fluorine-containing feed gas comprises SF.sub.6 or NF.sub.3. The fluorine-containing feed gas can also comprise CF.sub.4, or C2F.sub.6.

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First Claim

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all claims..

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MICRON TECHNOLOGY, INC.BOISE, ID21450

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cathey, David A Eagle, ID 173 3521

Cited Art Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (4)
4,726,879 RIE process for etching silicon isolation trenches and polycides with vertical surfaces 52 1986
4,734,157 Selective and anisotropic dry etching 35 1987
4,836,886 Binary chlorofluorocarbon chemistry for plasma etching 12 1987
4,836,887 Chlorofluorocarbon additives for enhancing etch rates in fluorinated halocarbon/oxidant plasmas 22 1987
 
TEXAS INSTRUMENTS INCORPORATED (2)
4,659,426 Plasma etching of refractory metals and their silicides 26 1985
4,855,017 Trench etch process for a single-wafer RIE dry etch reactor 152 1988
 
ADVANCED MICRO DEVICES, INC. (1)
4,468,285 Plasma etch process for single-crystal silicon with improved selectivity to silicon dioxide 19 1983
 
APPLIED MATERIALS, INC. (1)
4,778,563 Materials and methods for etching tungsten polycides using silicide as a mask 34 1987
 
EATON CORPORATION (1)
4,255,230 Plasma etching process 26 1980
 
LEYBOLD AKTIENGESELLSCHAFT (1)
4,863,549 Apparatus for coating or etching by means of a plasma 70 1988
 
MICRON TECHNOLOGY, INC. (1)
5,110,411 Method of isotropically dry etching a poly/WSi.sub.x sandwich structure 24 1990

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (108)
7,123,216 Photonic MEMS and structures 543 1999
7,138,984 Directly laminated touch sensitive screen 103 2001
6,867,896 Interferometric modulation of radiation 394 2001
6,680,792 Interferometric modulation of radiation 507 2001
6,710,908 Controlling micro-electro-mechanical cavities 342 2002
7,042,643 Interferometric modulation of radiation 177 2002
7,126,738 Visible spectrum modulator arrays 135 2002
7,110,158 Photonic MEMS and structures 175 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 30 2002
7,297,471 Method for manufacturing an array of interferometric modulators 19 2003
7,460,291 Separable modulator 53 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 147 2003
7,692,844 Interferometric modulation of radiation 20 2004
7,532,194 Driver voltage adjuster 4 2004
7,119,945 Altering temporal response of microelectromechanical elements 135 2004
7,706,050 Integrated modulator illumination 30 2004
7,476,327 Method of manufacture for microelectromechanical devices 38 2004
7,280,265 Interferometric modulation of radiation 45 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 50 2004
7,893,919 Display region architectures 8 2005
7,813,026 System and method of reducing color shift in a display 15 2005
7,379,227 Method and device for modulating light 12 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 39 2005
7,289,259 Conductive bus structure for interferometric modulator array 66 2005
7,460,246 Method and system for sensing light using interferometric elements 12 2005
7,012,732 Method and device for modulating light with a time-varying signal 62 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 4 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 14 2005
7,920,135 Method and system for driving a bi-stable display 4 2005
7,586,484 Controller and driver features for bi-stable display 17 2005
7,535,466 System with server based control of client device display features 8 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 47 2005
7,321,456 Method and device for corner interferometric modulation 42 2005
7,372,613 Method and device for multistate interferometric light modulation 73 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 39 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 4 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 35 2005
7,547,565 Method of manufacturing optical interference color display 13 2005
7,527,995 Method of making prestructure for MEMS systems 30 2005
7,808,703 System and method for implementation of interferometric modulator displays 4 2005
7,349,136 Method and device for a display having transparent components integrated therein 8 2005
RE42119 Microelectrochemical systems device and method for fabricating same 7 2005
8,008,736 Analog interferometric modulator device 4 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 26 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 63 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 9 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 15 2005
7,304,784 Reflective display device having viewable display on both sides 43 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 31 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 5 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 1 2005
7,492,502 Method of fabricating a free-standing microstructure 12 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 17 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 18 2005
7,564,612 Photonic MEMS and structures 67 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 190 2005
7,369,294 Ornamental display device 43 2005
7,684,104 MEMS using filler material and method 11 2005
7,653,371 Selectable capacitance circuit 18 2005
7,485,236 Interference display cell and fabrication method thereof 11 2005
7,236,284 Photonic MEMS and structures 93 2005
7,630,114 Diffusion barrier layer for MEMS devices 3 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 4 2005
7,916,980 Interconnect structure for MEMS device 2 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 7 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 8 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 27 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 44 2006
7,483,197 Photonic MEMS and structures 17 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 13 2006
7,532,377 Movable micro-electromechanical device 37 2006
7,643,203 Interferometric optical display system with broadband characteristics 22 2006
7,903,047 Mode indicator for interferometric modulator displays 3 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 2 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 8 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 5 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 47 2006
7,706,044 Optical interference display cell and method of making the same 9 2006
7,880,954 Integrated modulator illumination 15 2006
7,369,292 Electrode and interconnect materials for MEMS devices 14 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 18 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 83 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 17 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 6 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 72 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 7 2006
7,835,061 Support structures for free-standing electromechanical devices 10 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 50 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 12 2006
7,534,640 Support structure for MEMS device and methods therefor 15 2006
7,830,586 Transparent thin films 17 2006
7,554,711 MEMS devices with stiction bumps 43 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 6 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 34 2006
8,059,326 Display devices comprising of interferometric modulator and sensor 5 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 17 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 7 2007
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
7,719,754 Multi-thickness layers for MEMS and mask-saving sequence for same 0 2008
7,906,353 Method of fabricating interferometric devices using lift-off processing techniques 0 2009
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,817,357 Mechanical layer and methods of forming the same 0 2011
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
 
APPLIED MATERIALS, INC. (19)
5,851,926 Method for etching transistor gates using a hardmask 12 1996
5,866,483 Method for anisotropically etching tungsten using SF.sub.6, CHF.sub.3, and N.sub.2 32 1997
6,136,211 Self-cleaning etch process 81 1997
6,322,714 Process for etching silicon-containing material on substrates 20 1998
6,312,616 Plasma etching of polysilicon using fluorinated gas mixtures 9 1998
6,235,214 Plasma etching of silicon using fluorinated gas mixtures 22 1999
6,583,063 Plasma etching of silicon using fluorinated gas mixtures 23 1999
6,872,322 Multiple stage process for cleaning process chambers 21 1999
6,221,784 Method and apparatus for sequentially etching a wafer using anisotropic and isotropic etching 10 1999
6,797,188 Self-cleaning process for etching silicon-containing material 9 2000
6,527,968 Two-stage self-cleaning silicon etch process 23 2000
6,391,790 Method and apparatus for etching photomasks 9 2000
6,699,399 Self-cleaning etch process 9 2000
6,905,800 Etching a substrate in a process zone 16 2000
7,183,201 Selective etching of organosilicate films over silicon oxide stop etch layers 0 2001
6,534,417 Method and apparatus for etching photomasks 3 2002
7,115,523 Method and apparatus for etching photomasks 1 2003
8,293,430 Method for etching a molybdenum layer suitable for photomask fabrication 1 2005
7,244,672 Selective etching of organosilicate films over silicon oxide stop etch layers 17 2005
 
MICRON TECHNOLOGY, INC. (18)
5,916,004 Photolithographically produced flat panel display surface plate support structure 7 1996
5,866,979 Method for preventing junction leakage in field emission displays 33 1997
5,975,975 Apparatus and method for stabilization of threshold voltage in field emission displays 21 1997
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6,934,928 Method and apparatus for designing a pattern on a semiconductor surface 9 2002
6,898,779 Pattern generation on a semiconductor surface 4 2002
6,860,777 Radiation shielding for field emitters 0 2002
7,098,587 Preventing junction leakage in field emission devices 3 2003
7,370,306 Method and apparatus for designing a pattern on a semiconductor surface 1 2004
7,290,242 Pattern generation on a semiconductor surface 1 2005
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CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (2)
6,225,202 Selective etching of unreacted nickel after salicidation 7 2000
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CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 26 2004
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
6,403,412 Method for in-situ formation of bottle shaped trench by gas phase etching 12 1999
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 31 2004
 
KABUSHIKI KAISHA TOSHIBA (1)
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Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 73 2004
 
QUANTUM GLOBAL TECHNOLOGIES LLC (1)
8,118,946 Cleaning process residues from substrate processing chamber components 0 2007
 
Other [Check patent profile for assignment information] (1)
6,787,054 Two-stage etching process 7 2003