Method of manufacturing semiconductor devices

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United States of America Patent

PATENT NO 5358621
SERIAL NO

07975096

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a semiconductor device having multi-layer lead conductors, lead conductors of each layer and through connections are generated by electro chemical plating process. A flat and smooth surface is provided for each layer on which lead conductor base patterns are formed. Plating lead conductors on a layer and plating through connections are executed in a separate process. And, in these platings, electrolytic current is so controlled that the growth of plating is always from the base of the plating.

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Patent Owner(s)

Patent OwnerAddress
NEC CORPORATION108-8001 TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Oyama, Yasuo Tokyo, JP 8 181

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