Substrate transport apparatus
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United States of America Patent
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-
Nov 1, 1994
Grant Date -
N/A
app pub date -
Nov 18, 1992
filing date -
Nov 26, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A deck movable between cassettes arranged on a base for storing a plurality of substrates in multiple stages and a substrate cleaning section for cleaning the substrates, supports a substrate fetching arm for fetching the substrates from the cassettes, and a cleaned substrate depositing arm for depositing treated substrates. The depositing arm is vertically movable between a position in which a substrate supporting surface thereof is situated below a substrate supporting surface of the substrate fetching arm to render the latter operative, and a position in which the supporting surface of the depositing arm is situated above the supporting surface of the fetching arm to render the depositing arm operative.
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Cited Art Landscape
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