Plasma CVD apparatus and method therefor
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United States of America Patent
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Nov 1, 1994
Grant Date -
N/A
app pub date -
Mar 12, 1993
filing date -
Mar 13, 1992
priority date (Note) -
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Abstract
A plasma CVD apparatus for continuously forming a diamond-like film on a length of magnetic tape, includes a first vacuum vessel, a plasma generating vessel for transforming a gaseous medium into a plasma, and an electrode for accelerating ions of the plasma toward the substrate. The plasma generating vessel has a gas outflow port of a shape complementary to that of the portion of the magnetic tape readied for deposition. A portion of the plasma generating vessel is disposed within the vacuum vessel, with the gas outflow port facing the substrate. A gap between the substrate and the gas outflow port is set to maintain the pressure of plasma in the gap uniform.
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