Optical displacement measuring apparatus utilizing Fourier transform method
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United States of America Patent
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Nov 1, 1994
Grant Date -
N/A
app pub date -
Aug 12, 1992
filing date -
Aug 12, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An optical displacement measuring apparatus of the present invention optically measures a displacement amount of an object. The apparatus includes: image forming means for forming an image indicative of the displacement amount of the object achieved between first and second timings; first modulating means for modulating coherent light in accordance with the image; first Fourier transform means for subjecting the coherent light modulated by said first modulating means to Fourier transformation to thereby form a first Fourier image; second modulating means for modulating coherent light in accordance with the first Fourier image; second Fourier transform means for subjecting the coherent light modulated by said second modulating means to Fourier transformation to thereby form a second Fourier image; detecting means for detecting peak position of the second Fourier image indicative of the displacement amount of the object between the first and second timings; and time interval adjusting means for adjusting a time interval defined between the first and second timings.
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