Diffraction device
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United States of America Patent
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Nov 8, 1994
Issued Date -
N/A
app pub date -
Jan 7, 1993
filing date -
Jun 3, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides a diffraction device having a high diffraction efficiency with respect to a wide-band radiation beam. A diffraction device comprises a substrate and a diffraction grating formed on the substrate, wherein the diffraction grating is formed so that a full-width of wavelength at half maximum of a diffraction efficiency of a beam diffracted by the diffraction grating is not less than about 8% of a value of a center wavelength of the diffracted beam.
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