Article storage house in a clean room
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United States of America Patent
Stats
-
Nov 15, 1994
Grant Date -
N/A
app pub date -
Jan 21, 1993
filing date -
Jan 21, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An article storage house in a clean room for airtightly accommodating a wafer cassette, etc. in which the wafer cassette carried in from the outside of an article carry-in/out portion is accommodated into a container by an automatic article delivery unit disposed in the article carry-in/out portion or it is carried in the article storage house while it is accommodated in the container and is stored in sections of the article storage house. An inert gas purge mechanism and an automatic container cleaning portion are disposed in the automatic article delivery unit or each section.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
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