Apparatus for clean transfer of objects
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United States of America Patent
Stats
-
Nov 15, 1994
Grant Date -
N/A
app pub date -
Jun 23, 1992
filing date -
Jun 24, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the first transfer port. The first connecting member is provided with at least an exterior portion. A second vaccum chamber includes a second transfer port, a second shutter for opening and closing the second transfer port, and a second connecting member surrounding the second transfer port. The second connecting member has at least an exterior portion. A closed space is formed between the first and second connecting members, so that the first and second shutters are movable within the closed space.
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