Cantilever chip for scanning probe microscope
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United States of America Patent
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-
Nov 22, 1994
Grant Date -
N/A
app pub date -
Jan 12, 1993
filing date -
Jan 17, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A cantilever chip has a holding substrate, and a cantilever having the shape of a hollow triangle extends from the holding substrate. A probe is arranged at the distal end portion of the cantilever. An axis of the probe is inclined at a predetermined angle with respect to a normal extending from the surface of the cantilever. This angle is set such that the axis of the probe is perpendicular to a sample surface when the cantilever chip is mounted on an atomic force microscope.
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