Method and system for controlling plating bath parameters
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United States of America Patent
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Nov 29, 1994
Grant Date -
N/A
app pub date -
Feb 23, 1993
filing date -
Feb 23, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention is directed to an expert control system for controlling plating bath parameters. The system uses both feed-forward and feed-backward control to determine the amount and timing of replenisher additions of bath constituents to maintain optimum bath efficiency.
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