Sensor for sensing fingerpaints and method for producing the sensor
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United States of America Patent
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Dec 13, 1994
Grant Date -
N/A
app pub date -
Oct 25, 1993
filing date -
Oct 26, 1992
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A grid-like arrangement of membranes of doped polysilicon are mounted on a substrate but are electrically insulated therefrom each membrane extends over a cavity and is joined to the substrate at at least two supporting locations so that they cavity lies between the membrane and the substrate. Changes in an electrical quantity existing between the membranes and the substrate are measured as forces exerted on the grid-like arrangement of sensor elements so that the ridges in the skin on a finger tip may be sensed for detecting a fingerprint.
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