Transfer device for transferring a substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5374147
SERIAL NO

07942841

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A device for transferring a LCD substrate under a reduced pressure atmosphere comprises a first stage on which the LCD substrate is mounted such that the surface of the LCD substrate is substantially horizontal, a multi-joint arm mechanism for mounting the LCD substrate on a second stage of a delivery position after moving the first stage in substantially horizontal plane, a mechanism for pushing the LCD substrate on the first and second stages, and for positioning the LCD substrate at a home position.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TOKYO ELECTRON LIMITEDTOKYO5246

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asakawa, Teruo Yamanashi, JP 34 970
Hiroki, Tsutomu Yamanashi, JP 50 317

Cited Art Landscape

Patent Info (Count) # Cites Year
 
NIHON SHINKU GIJUTSU KABUSHIKI KAISHA (1)
* 5147168 Loading and unloading airlock apparatus for a vacuum treatment chamber 10 1989
 
NIKON CORPORATION (2)
* 4483434 Apparatus for conveying semiconductor substrates 15 1982
* 4655584 Substrate positioning apparatus 39 1985
 
ASYST JAPAN INC. (1)
* 5054991 Wafer positioning apparatus 36 1990
 
Raychem Corporation (1)
* 4365400 Apparatus for installing sleeves on substrates 7 1980
 
WORLDWIDE INNOVATIVE ENGINEERING (1)
* 4582191 Article handling apparatus and method 22 1985
 
TEXAS INSTRUMENTS INCORPORATED (1)
* 5052886 Semiconductor wafer orientation device 17 1988
 
TET TECHNO INVESTMENT TRUST SETTLEMENT, A CORP. OF PRINCEIPALITY OF LIECHTENSTEIN (1)
* 5092557 Apparatus for holding and positioning a substrate cassette 10 1990
 
PERKIN-ELMER CORPORATION, THE (1)
* 4425075 Wafer aligners 23 1981
 
ADE CORPORATION (2)
* 4897015 Rotary to linear motion robot arm 66 1987
* 5102280 Robot prealigner 66 1989
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
SCREEN HOLDINGS CO., LTD. (1)
* 5823736 Substrate processing device and method for substrate from the substrate processing device 39 1996
 
ASM JAPAN K.K. (1)
6305898 Wafer transfer mechanism 34 1999
 
NIKON CORPORATION (1)
* 6707528 Exposure apparatus having independent chambers and methods of making the same 7 1999
 
JAPAN DISPLAY CENTRAL INC. (3)
* 5740059 Method of transporting substrates and apparatus for transporting substrates 29 1996
6327512 Method and apparatus using positional data detected in a non-contact manner to transfer a substrate from a first position to a second position 7 1998
6459947 Apparatus using positional data detected in a non-contact manner to transfer a substantially rectangular substrate from a first position to a second position 6 2001
 
SONY CORPORATION (1)
* 5669316 Turntable for rotating a wafer carrier 101 1993
 
PANASONIC CORPORATION (2)
* 7942971 Method of manufacturing plasma display panels 0 2004
* 2006/0068,084 Method for manufacturing plasma display panels 5 2004
 
NIHON DEMPA KOGYO CO., LTD. (1)
* 2008/0101,893 VACUUM PROCESSING APPARATUS AND A METHOD FOR VENTING TO ATMOSPHERE 3 2007
 
MICRON TECHNOLOGY, INC. (1)
* 5836575 Wafer manual handpick station 17 1996
 
BOE-HYDIS TECHNOLOGY CO., LTD. (1)
* 2005/0275,781 Rubbing apparatus for LCD 0 2005
 
PERSIMMON TECHNOLOGIES CORPORATION (1)
9149936 Robot having arm with unequal link lengths 1 2013
 
NORDSON CORPORATION (1)
* 6709522 Material handling system and methods for a multichamber plasma treatment system 5 2000
 
VARIAN JAPAN K.K. (1)
* 5474410 Multi-chamber system provided with carrier units 92 1994
 
APPLIED MATERIALS, INC. (33)
* 5955858 Mechanically clamping robot wrist 26 1997
* 6155773 Substrate clamping apparatus 34 1997
6322312 Mechanical gripper for wafer handling robots 26 1999
6283701 Pneumatically actuated flexure gripper for wafer handling robots 42 1999
6222337 Mechanically clamping robot wrist 23 1999
6709218 Robot blade for semiconductor processing equipment 10 1999
6513848 Hydraulically actuated wafer clamp 10 1999
6537011 Method and apparatus for transferring and supporting a substrate 22 2000
6514033 Mechanical gripper for wafer handling robots 14 2001
* 2003/0168,175 Substrate alignment apparatus 4 2002
* 7641247 End effector assembly for supporting a substrate 10 2002
7077973 Methods for substrate orientation 2 2003
* 2004/0209,477 Methods for substrate orientation 13 2003
7128806 Mask etch processing apparatus 85 2003
* 2005/0133,158 Mask handler apparatus 3 2003
* 2005/0133,166 Tuned potential pedestal for mask etch processing apparatus 2 2004
* 7151981 Methods and apparatus for positioning a substrate relative to a support stage 4 2004
* 7207766 Load lock chamber for large area substrate processing system 21 2004
* 2006/0005,770 Independently moving substrate supports 4 2004
* 7735710 Substrate support 3 2004
* 2005/0063,800 Substrate support 5 2004
* 2005/0255,244 Lifting glass substrate without center lift pins 0 2005
7497414 Curved slit valve door with flexible coupling 3 2006
7845891 Decoupled chamber body 18 2006
7665951 Multiple slot load lock chamber and method of operation 26 2006
7879151 Mask etch processing apparatus 0 2006
* 2007/0007,660 MASK ETCH PROCESSING APPARATUS 2 2006
* 2007/0062,454 METHOD FOR DECHUCKING A SUBSTRATE 1 2006
7499767 Methods and apparatus for positioning a substrate relative to a support stage 2 2006
* 2007/0073,443 METHODS AND APPARATUS FOR POSITIONING A SUBSTRATE RELATIVE TO A SUPPORT STAGE 0 2006
7651315 Large area substrate transferring method for aligning with horizontal actuation of lever arm 0 2007
7845618 Valve door with ball coupling 2 2007
8124907 Load lock chamber with decoupled slit valve door seal compartment 1 2007
 
SII NANOTECHNOLOGY INC. (1)
* 5484252 Sample holding apparatus 14 1994
 
SINGULUS TECHNOLOGIES AG (2)
* 8961094 Method and device for aligning substrates 0 2010
* 2012/0009,051 METHOD AND DEVICE FOR ALIGNING SUBSTRATES 0 2010
 
TEC-SEM AG (1)
6540468 Device and method for handling individual wafers 15 2001
 
TOKYO ELECTRON LIMITED (8)
* 5636960 Apparatus for detecting and aligning a substrate 42 1995
* 5825500 Unit for transferring to-be-inspected object to inspection position 7 1996
* 6075373 Inspection device for inspecting a semiconductor wafer 28 1997
* 6146083 Substrate transferring apparatus and substrate processing apparatus using the same 11 1998
* 7611124 Vacuum processing apparatus 1 2005
8113487 Vacuum processing apparatus 0 2009
* 2011/0027,052 SUBSTRATE POSITION ALIGNMENT MECHANISM, VACUUM PRECHAMBER AND SUBSTRATE PROCESSING SYSTEM HAVING SAME 1 2010
8523138 Vacuum processing apparatus 0 2012
* Cited By Examiner