Transfer device for transferring a substrate
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United States of America Patent
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-
Dec 20, 1994
Grant Date -
N/A
app pub date -
Sep 10, 1992
filing date -
Sep 10, 1991
priority date (Note) -
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status (Latency Note)
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Abstract
A device for transferring a LCD substrate under a reduced pressure atmosphere comprises a first stage on which the LCD substrate is mounted such that the surface of the LCD substrate is substantially horizontal, a multi-joint arm mechanism for mounting the LCD substrate on a second stage of a delivery position after moving the first stage in substantially horizontal plane, a mechanism for pushing the LCD substrate on the first and second stages, and for positioning the LCD substrate at a home position.
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