US Patent No: 5,374,147

Number of patents in Portfolio can not be more than 2000

Transfer device for transferring a substrate

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ATTORNEY / AGENT: (SPONSORED)
 

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Abstract

A device for transferring a LCD substrate under a reduced pressure atmosphere comprises a first stage on which the LCD substrate is mounted such that the surface of the LCD substrate is substantially horizontal, a multi-joint arm mechanism for mounting the LCD substrate on a second stage of a delivery position after moving the first stage in substantially horizontal plane, a mechanism for pushing the LCD substrate on the first and second stages, and for positioning the LCD substrate at a home position.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TOKYO ELECTRON LIMITEDTOKYO5116

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asakawa, Teruo Tokyo-To, JP 33 824
Hiroki, Tsutomu Yamanashi, JP 40 177

Cited Art

Patent Info (Count) # Cites Year
 
ADE CORPORATION (2)
4,897,015 Rotary to linear motion robot arm 57 1987
5,102,280 Robot prealigner 56 1989
 
NIKON CORPORATION (2)
4,483,434 Apparatus for conveying semiconductor substrates 15 1982
4,655,584 Substrate positioning apparatus 37 1985
 
ASYST JAPAN INC. (1)
5,054,991 Wafer positioning apparatus 35 1990
 
NIHON SHINKU GIJUTSU KABUSHIKI KAISHA (1)
5,147,168 Loading and unloading airlock apparatus for a vacuum treatment chamber 8 1989
 
RAYCHEM CORPORATION (1)
4,365,400 Apparatus for installing sleeves on substrates 5 1980
 
TET TECHNO INVESTMENT TRUST SETTLEMENT, A CORP. OF PRINCEIPALITY OF LIECHTENSTEIN (1)
5,092,557 Apparatus for holding and positioning a substrate cassette 10 1990
 
TEXAS INSTRUMENTS INCORPORATED (1)
5,052,886 Semiconductor wafer orientation device 15 1988
 
THE PERKIN-ELMER CORPORATION (1)
4,425,075 Wafer aligners 23 1981
 
WORLDWIDE INNOVATIVE ENGINEERING (1)
4,582,191 Article handling apparatus and method 22 1985

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
APPLIED MATERIALS, INC. (23)
5,955,858 Mechanically clamping robot wrist 21 1997
6,155,773 Substrate clamping apparatus 25 1997
6,322,312 Mechanical gripper for wafer handling robots 16 1999
6,283,701 Pneumatically actuated flexure gripper for wafer handling robots 24 1999
6,222,337 Mechanically clamping robot wrist 16 1999
6,709,218 Robot blade for semiconductor processing equipment 5 1999
6,513,848 Hydraulically actuated wafer clamp 3 1999
6,537,011 Method and apparatus for transferring and supporting a substrate 13 2000
6,514,033 Mechanical gripper for wafer handling robots 7 2001
7,641,247 End effector assembly for supporting a substrate 1 2002
7,077,973 Methods for substrate orientation 2 2003
7,128,806 Mask etch processing apparatus 2 2003
7,151,981 Methods and apparatus for positioning a substrate relative to a support stage 2 2004
7,207,766 Load lock chamber for large area substrate processing system 14 2004
7,735,710 Substrate support 1 2004
7,497,414 Curved slit valve door with flexible coupling 1 2006
7,845,891 Decoupled chamber body 8 2006
7,665,951 Multiple slot load lock chamber and method of operation 12 2006
7,879,151 Mask etch processing apparatus 0 2006
7,499,767 Methods and apparatus for positioning a substrate relative to a support stage 0 2006
7,651,315 Large area substrate transferring method for aligning with horizontal actuation of lever arm 0 2007
7,845,618 Valve door with ball coupling 0 2007
8,124,907 Load lock chamber with decoupled slit valve door seal compartment 0 2007
 
TOKYO ELECTRON LIMITED (6)
5,636,960 Apparatus for detecting and aligning a substrate 29 1995
5,825,500 Unit for transferring to-be-inspected object to inspection position 6 1996
6,075,373 Inspection device for inspecting a semiconductor wafer 28 1997
6,146,083 Substrate transferring apparatus and substrate processing apparatus using the same 5 1998
7,611,124 Vacuum processing apparatus 0 2005
8,113,487 Vacuum processing apparatus 0 2009
 
TOSHIBA MOBILE DISPLAY CO., LTD. (3)
5,740,059 Method of transporting substrates and apparatus for transporting substrates 24 1996
6,327,512 Method and apparatus using positional data detected in a non-contact manner to transfer a substrate from a first position to a second position 3 1998
6,459,947 Apparatus using positional data detected in a non-contact manner to transfer a substantially rectangular substrate from a first position to a second position 4 2001
 
ASM JAPAN K.K. (1)
6,305,898 Wafer transfer mechanism 18 1999
 
DAINIPPON SCREEN MFG. CO., LTD. (1)
5,823,736 Substrate processing device and method for substrate from the substrate processing device 35 1996
 
MICRON TECHNOLOGY, INC. (1)
5,836,575 Wafer manual handpick station 13 1996
 
NIKON CORPORATION (1)
6,707,528 Exposure apparatus having independent chambers and methods of making the same 7 1999
 
NORDSON CORPORATION (1)
6,709,522 Material handling system and methods for a multichamber plasma treatment system 4 2000
 
PANASONIC CORPORATION (1)
7,942,971 Method of manufacturing plasma display panels 0 2004
 
SII NANOTECHNOLOGY INC. (1)
5,484,252 Sample holding apparatus 10 1994
 
SONY ELECTRONICS INC. (1)
5,669,316 Turntable for rotating a wafer carrier 98 1993
 
TEC-SEM AG (1)
6,540,468 Device and method for handling individual wafers 7 2001
 
VARIAN JAPAN K.K. (1)
5,474,410 Multi-chamber system provided with carrier units 86 1994