Fabrication and laser deletion of microfuses
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 20, 1994
Grant Date -
N/A
app pub date -
Apr 28, 1993
filing date -
Apr 28, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method of fabricating a microfuse, deletable by laser pulses utilizes laser pulses of a predetermined spot diameter and beam alignment accuracy. A fusible link forming a portion of the microfuse is defined such that its length is at least equal to the sum of the laser spot diameter and the beam alignment accuracy and its width is no greater than half the laser spot diameter. A method of deleting the microfuse by laser pulses is provided where the microfuse has a predetermined composition, length and width having an axis bisecting the width and parallel to the length and is covered with a passivation layer at least 3 .mu.m thick. The method includes adjusting the diameter of the beam of laser light (i) to at least a minimum diameter of W+.DELTA.P.sub.w, where W equals the width of the microfuse fuse link and .DELTA. P.sub.w equals the accuracy of the beam in the direction of W and (ii) to no more than a maximum diameter of L+.DELTA.P.sub.L, where L equals the length of the microfuse fuse link and .DELTA.P.sub.L equals the accuracy of the beam in the direction of L.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully