Vacuum chuck
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United States of America Patent
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-
Dec 20, 1994
Issued Date -
N/A
app pub date -
Apr 25, 1994
filing date -
May 7, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer holding device of the vacuum attraction type includes a structural member having a protrusion for supporting a wafer and elastic members made of a material having an elasticity modulus smaller than that of the wafer and that of the structural member. The elastic members are distributed on a wafer attraction plane of the structural member.
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