Manufacturing management and apparatus for a semiconductor device

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United States of America Patent

PATENT NO 5375061
SERIAL NO

07799181

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Abstract

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A production management method in a production system for semiconductor devices uses processing progress information for each of the plural number of manufacturing apparatus as the basis for performing start allocation of a plural number of next start product groups. When the state of progress has reached a certain stage and is close to the end, a product group of the same type as that which a manufacturing apparatus is processing from amongst start standby product groups is determined as the object of same type priority allocation. A link is made beforehand between that product group and a manufacturing apparatus for which that processing is about to end, and a product group that is an object of same type priority allocation to a manufacturing apparatus that is processing products of that same type, is not started by a manufacturing apparatus that is processing a product of a different type even if that manufacturing apparatus finishes its processing of a product of that different type earlier.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hara, Kenjiro Yokohama, JP 6 61
Kajio, Atsunori Kawasaki, JP 1 48

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