System and method for adding a control function to a semiconductor equipment system
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United States of America Patent
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Dec 20, 1994
Grant Date -
N/A
app pub date -
Apr 13, 1992
filing date -
Apr 13, 1992
priority date (Note) -
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Abstract
A semiconductor system (10) has a computer (16) coupled to equipment (14) for processing semiconductor wafers. The computer (16) has a CPU (18) for controlling and manipulating computer information, and a memory (16). A portion of the memory (14) stores programs, and is referred to as system code (17). A first portion of the system code (17) is used to store process equipment code (22) which provides control for equipment (14). A second portion of the system code (17) is used to store user function code (20) which provides system security and system/user error reduction. A user input device (28) is used by a human user to interface to the system (10). The user function code (20) prevents the process equipment code (22) from controlling equipment (14) until the human user has entered correct data regarding the wafers being prepared for processing, processing operation information for system (10), and/or like information.
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