Device for holding and rotating a substrate
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United States of America Patent
Stats
-
Dec 27, 1994
Grant Date -
N/A
app pub date -
Mar 30, 1994
filing date -
Mar 31, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A plurality of substrate holding members and a substrate pressing member are disposed on a rotation stage at a peripheral portion. The substrate pressing member includes a magnet and is pivotally supported by the rotation stage. A ring-shaped permanent magnet is located below the rotation stage and forms a ring around the rotation axis of the rotation stage. When a substrate mounted on the rotation stage is rotated and processed, the ring-shaped permanent magnet is positioned in the vicinity of the magnet of the substrate pressing member. This creates a magnetic force between the magnets, causing the substrate pressing member to pivot so that the substrate pressing member contacts the edge of the substrate with a predetermined amount of pressure.
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