Substrate for recording head, recording head and method for producing same
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United States of America Patent
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Dec 27, 1994
Grant Date -
N/A
app pub date -
Apr 20, 1992
filing date -
Apr 20, 1991
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Abstract
A method for producing a substrate for a recording head wherein a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving the electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of the driving functional elements and each of the electro-thermal converting elements are formed on a supporting member by photolithography comprises forming the wiring electrodes by etching a material layer for the wiring electrodes while etchingwise removing a photoresist for masking the material layer for the wiring electrodes.
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