Aeration apparatus for producing ultrapure water

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United States of America Patent

PATENT NO 5380471
SERIAL NO

08203611

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Abstract

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In an aeration apparatus and method for producing ultrapure water, a device for vigorously mixing an aeration gas with untreated water is attached to a water pipe through which the water is fed to a reaction tank. The device vigorously mixes the aeration gas with the untreated water in the water pipe before the water reaches the reaction tank. The reaction tank can be smaller, an aeration system for producing ultrapure water can be simpler, and the efficiency of the aeration system can be improved.

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Patent Owner(s)

Patent OwnerAddress
RENESAS ELECTRONICS CORPORATION2-24 TOYOSU 3-CHOME KOTO-KU TOKYO 135-0061

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ban, Cozy Itami, JP 20 374
Fukumoto, Takaaki Itami, JP 44 943
Manabe, Toshiki Toda, JP 6 178
Yanagi, Motonori Itami, JP 10 164
Yanome, Hiroshi Toda, JP 4 71

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