Stocker
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United States of America Patent
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Jan 10, 1995
Grant Date -
N/A
app pub date -
Mar 11, 1993
filing date -
Mar 13, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A stocker for accommodating, storing or transporting articles in clean, contamination-free conditions for either a long time or temporarily. The stocker has a particle collector provided in a part thereof. The particle collector includes an irradiation source such as ultraviolet light source, and a photoelectron emitting material that emits photoelectrons on irradiation with irradiation energy from the irradiation source. The particle collector further includes an electric field forming electrode, and a charged particle collecting material. The space where the particle collector is provided is preferably partitioned from the other space of the stocker by an irradiation energy screening material.
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