Method of fabricating a two-color detector using LPE crystal growth

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United States of America Patent

PATENT NO 5380669
SERIAL NO

08014939

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Abstract

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Disclosed is a method of fabricating a two-color radiation detector, and two-color photodetectors fabricated by the method. A structure is grown upon a substrate (10) to provide, in sequence, a LPE grown LWIR n-type layer (12), a MWIR p+ type common contact layer (14), and a MWIR n-type layer (16). Following growth of the MWIR n-type layer, a layer of passivation (18) is applied, and the substrate is removed to so as to enable further processing of the structure into an array (1) of two-color photodetectors. The three layer structure is bonded, prior to further processing, to a supporting substrate (22) with an adhesive bond made to the passivation layer. The supporting substrate is comprised of IR transparent material such as Group IIB-VIA semiconductor material, Group IIIA-VA semiconductor material, Group IVA semiconductor material, sapphire, and combinations thereof. The supporting substrate may be subsequently removed after hybridizing a photodetector array (2) with readout electronics to provide a thinned detector array having a reduced cool-down time.

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Patent Owner(s)

Patent OwnerAddress
SANTA BARBARA RESEARCH CENTERB1/106 75 COROMAR DRIVE GOLETA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Norton, Paul R Santa Barbara, CA 16 304

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