| 7,123,216 Photonic MEMS and structures
|
480 |
1999
|
| 6,650,455 Photonic mems and structures
|
453 |
2001
|
| 7,126,738 Visible spectrum modulator arrays
|
116 |
2002
|
| 7,110,158 Photonic MEMS and structures
|
157 |
2002
|
| 7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
|
20 |
2002
|
| 7,297,471 Method for manufacturing an array of interferometric modulators
|
17 |
2003
|
| 7,221,495 Thin film precursor stack for MEMS manufacturing
|
93 |
2003
|
| 7,460,291 Separable modulator
|
42 |
2003
|
| 7,198,973 Method for fabricating an interference display unit
|
89 |
2003
|
| 7,692,844 Interferometric modulation of radiation
|
10 |
2004
|
| 7,532,194 Driver voltage adjuster
|
3 |
2004
|
| 7,706,050 Integrated modulator illumination
|
27 |
2004
|
| 7,193,768 Interference display cell
|
22 |
2004
|
| 7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof
|
25 |
2004
|
| 7,476,327 Method of manufacture for microelectromechanical devices
|
29 |
2004
|
| 7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device
|
44 |
2004
|
| 7,893,919 Display region architectures
|
2 |
2005
|
| 7,813,026 System and method of reducing color shift in a display
|
10 |
2005
|
| 7,355,780 System and method of illuminating interferometric modulators using backlighting
|
35 |
2005
|
| 7,289,259 Conductive bus structure for interferometric modulator array
|
55 |
2005
|
| 7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device
|
3 |
2005
|
| 7,429,334 Methods of fabricating interferometric modulators by selectively removing a material
|
12 |
2005
|
| 7,420,728 Methods of fabricating interferometric modulators by selectively removing a material
|
15 |
2005
|
| 7,302,157 System and method for multi-level brightness in interferometric modulation
|
37 |
2005
|
| 7,321,456 Method and device for corner interferometric modulation
|
32 |
2005
|
| 7,372,613 Method and device for multistate interferometric light modulation
|
63 |
2005
|
| 7,420,725 Device having a conductive light absorbing mask and method for fabricating same
|
29 |
2005
|
| 7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge
|
3 |
2005
|
| 7,719,500 Reflective display pixels arranged in non-rectangular arrays
|
26 |
2005
|
| 7,547,565 Method of manufacturing optical interference color display
|
12 |
2005
|
| 7,527,995 Method of making prestructure for MEMS systems
|
20 |
2005
|
| 7,349,136 Method and device for a display having transparent components integrated therein
|
7 |
2005
|
| RE42119 Microelectrochemical systems device and method for fabricating same
|
4 |
2005
|
| 8,008,736 Analog interferometric modulator device
|
0 |
2005
|
| 7,460,292 Interferometric modulator with internal polarization and drive method
|
19 |
2005
|
| 7,554,714 Device and method for manipulation of thermal response in a modulator
|
18 |
2005
|
| 7,553,684 Method of fabricating interferometric devices using lift-off processing techniques
|
6 |
2005
|
| 7,417,783 Mirror and mirror layer for optical modulator and method
|
7 |
2005
|
| 7,373,026 MEMS device fabricated on a pre-patterned substrate
|
12 |
2005
|
| 7,304,784 Reflective display device having viewable display on both sides
|
32 |
2005
|
| 7,161,730 System and method for providing thermal compensation for an interferometric modulator display
|
78 |
2005
|
| 7,567,373 System and method for micro-electromechanical operation of an interferometric modulator
|
19 |
2005
|
| 7,936,497 MEMS device having deformable membrane characterized by mechanical persistence
|
0 |
2005
|
| 7,492,502 Method of fabricating a free-standing microstructure
|
11 |
2005
|
| 7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
|
14 |
2005
|
| 7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator
|
10 |
2005
|
| 7,564,612 Photonic MEMS and structures
|
53 |
2005
|
| 7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator
|
142 |
2005
|
| 7,684,104 MEMS using filler material and method
|
7 |
2005
|
| 7,236,284 Photonic MEMS and structures
|
82 |
2005
|
| 7,630,114 Diffusion barrier layer for MEMS devices
|
1 |
2005
|
| 7,776,631 MEMS device and method of forming a MEMS device
|
6 |
2005
|
| 7,795,061 Method of creating MEMS device cavities by a non-etching process
|
1 |
2005
|
| 7,916,980 Interconnect structure for MEMS device
|
0 |
2006
|
| 7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture
|
4 |
2006
|
| 7,547,568 Electrical conditioning of MEMS device and insulating layer thereof
|
6 |
2006
|
| 7,550,810 MEMS device having a layer movable at asymmetric rates
|
19 |
2006
|
| 7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers
|
40 |
2006
|
| 7,483,197 Photonic MEMS and structures
|
16 |
2006
|
| 7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices
|
11 |
2006
|
| 7,532,377 Movable micro-electromechanical device
|
28 |
2006
|
| 7,643,203 Interferometric optical display system with broadband characteristics
|
17 |
2006
|
| 7,711,239 Microelectromechanical device and method utilizing nanoparticles
|
0 |
2006
|
| 7,623,287 Non-planar surface structures and process for microelectromechanical systems
|
4 |
2006
|
| 7,527,996 Non-planar surface structures and process for microelectromechanical systems
|
4 |
2006
|
| 7,417,784 Microelectromechanical device and method utilizing a porous surface
|
42 |
2006
|
| 7,706,044 Optical interference display cell and method of making the same
|
8 |
2006
|
| 7,880,954 Integrated modulator illumination
|
14 |
2006
|
| 7,369,292 Electrode and interconnect materials for MEMS devices
|
13 |
2006
|
| 7,349,139 System and method of illuminating interferometric modulators using backlighting
|
15 |
2006
|
| 7,372,619 Display device having a movable structure for modulating light and method thereof
|
74 |
2006
|
| 7,649,671 Analog interferometric modulator device with electrostatic actuation and release
|
7 |
2006
|
| 7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports
|
3 |
2006
|
| 7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts
|
60 |
2006
|
| 7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures
|
4 |
2006
|
| 7,835,061 Support structures for free-standing electromechanical devices
|
4 |
2006
|
| 7,385,744 Support structure for free-standing MEMS device and methods for forming the same
|
42 |
2006
|
| 7,527,998 Method of manufacturing MEMS devices providing air gap control
|
10 |
2006
|
| 7,566,940 Electromechanical devices having overlying support structures
|
7 |
2006
|
| 7,534,640 Support structure for MEMS device and methods therefor
|
13 |
2006
|
| 7,830,586 Transparent thin films
|
10 |
2006
|
| 7,554,711 MEMS devices with stiction bumps
|
30 |
2006
|
| 7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
|
3 |
2006
|
| 7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants
|
24 |
2006
|
| 7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge
|
3 |
2006
|
| 7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge
|
2 |
2006
|
| 7,580,172 MEMS device and interconnects for same
|
4 |
2006
|
| 7,898,722 Microelectromechanical device with restoring electrode
|
26 |
2006
|
| 7,629,197 Spatial light modulator
|
27 |
2006
|
| 7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure
|
4 |
2006
|
| 7,619,810 Systems and methods of testing micro-electromechanical devices
|
2 |
2006
|
| 7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
|
40 |
2006
|
| 7,355,782 Systems and methods of controlling micro-electromechanical devices
|
6 |
2006
|
| 7,706,042 MEMS device and interconnects for same
|
2 |
2006
|
| 7,535,621 Aluminum fluoride films for microelectromechanical system applications
|
23 |
2006
|
| 7,652,814 MEMS device with integrated optical element
|
3 |
2007
|
| 7,884,989 White interferometric modulators and methods for forming the same
|
2 |
2007
|
| 7,872,792 Method and device for modulating light with multiple electrodes
|
4 |
2007
|
| 7,846,344 Method and device for modulating light
|
0 |
2007
|
| 7,733,552 MEMS cavity-coating layers and methods
|
3 |
2007
|
| 7,742,220 Microelectromechanical device and method utilizing conducting layers separated by stops
|
7 |
2007
|
| 8,059,326 Display devices comprising of interferometric modulator and sensor
|
1 |
2007
|
| 7,715,085 Electromechanical system having a dielectric movable membrane and a mirror
|
4 |
2007
|
| 7,643,202 Microelectromechanical system having a dielectric movable membrane and a mirror
|
5 |
2007
|
| 7,625,825 Method of patterning mechanical layer for MEMS structures
|
0 |
2007
|
| 7,643,199 High aperture-ratio top-reflective AM-iMod displays
|
6 |
2007
|
| 7,782,517 Infrared and dual mode displays
|
4 |
2007
|
| 7,944,599 Electromechanical device with optical function separated from mechanical and electrical function
|
1 |
2007
|
| 7,630,121 Electromechanical device with optical function separated from mechanical and electrical function
|
9 |
2007
|
| 7,612,932 Microelectromechanical device with optical function separated from mechanical and electrical function
|
14 |
2007
|
| 8,068,268 MEMS devices having improved uniformity and methods for making them
|
1 |
2007
|
| 8,115,987 Modulating the intensity of light from an interferometric reflector
|
0 |
2007
|
| 7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device
|
14 |
2007
|
| 7,570,415 MEMS device and interconnects for same
|
1 |
2007
|
| 8,081,369 System and method for a MEMS device
|
0 |
2007
|
| 7,852,545 Method and device for modulating light
|
8 |
2007
|
| 7,848,004 System and method for a MEMS device
|
5 |
2007
|
| 7,830,587 Method and device for modulating light with semiconductor substrate
|
9 |
2007
|
| 7,826,120 Method and device for multi-color interferometric modulation
|
8 |
2007
|
| 7,808,694 Method and device for modulating light
|
8 |
2007
|
| 7,738,157 System and method for a MEMS device
|
11 |
2007
|
| 8,072,402 Interferometric optical modulator with broadband reflection characteristics
|
1 |
2007
|
| 7,492,503 System and method for multi-level brightness in interferometric modulation
|
19 |
2007
|
| 7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
|
2 |
2007
|
| 7,564,613 Microelectromechanical device and method utilizing a porous surface
|
2 |
2007
|
| 7,982,700 Conductive bus structure for interferometric modulator array
|
0 |
2007
|
| 7,542,198 Device having a conductive light absorbing mask and method for fabricating same
|
19 |
2007
|
| 7,999,993 Reflective display device having viewable display on both sides
|
0 |
2007
|
| 7,773,286 Periodic dimple array
|
2 |
2007
|
| 7,715,079 MEMS devices requiring no mechanical support
|
3 |
2007
|
| 7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator
|
6 |
2007
|
| 8,058,549 Photovoltaic devices with integrated color interferometric film stacks
|
1 |
2007
|
| 7,847,999 Interferometric modulator display devices
|
1 |
2008
|
| 7,663,794 Methods and devices for inhibiting tilting of a movable element in a MEMS device
|
8 |
2008
|
| 7,515,327 Method and device for corner interferometric modulation
|
10 |
2008
|
| 7,863,079 Methods of reducing CD loss in a microelectromechanical device
|
0 |
2008
|
| 7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
|
2 |
2008
|
| 8,164,821 Microelectromechanical device with thermal expansion balancing layer or stiffening layer
|
0 |
2008
|
| 8,040,588 System and method of illuminating interferometric modulators using backlighting
|
0 |
2008
|
| 7,612,933 Microelectromechanical device with spacing layer
|
16 |
2008
|
| 7,898,723 Microelectromechanical systems display element with photovoltaic structure
|
5 |
2008
|
| 7,969,638 Device having thin black mask and method of fabricating the same
|
0 |
2008
|
| 7,688,494 Electrode and interconnect materials for MEMS devices
|
10 |
2008
|
| 7,839,557 Method and device for multistate interferometric light modulation
|
5 |
2008
|
| 8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture
|
1 |
2008
|
| 8,023,167 Backlight displays
|
0 |
2008
|
| 7,768,690 Backlight displays
|
1 |
2008
|
| 7,746,539 Method for packing a display device and the device obtained thereof
|
1 |
2008
|
| 8,226,836 Mirror and mirror layer for optical modulator and method
|
0 |
2008
|
| 7,855,826 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
|
6 |
2008
|
| 8,054,527 Adjustably transmissive MEMS-based devices
|
0 |
2008
|
| 7,704,772 Method of manufacture for microelectromechanical devices
|
11 |
2008
|
| 7,859,740 Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
|
0 |
2008
|
| 7,672,035 Separable modulator
|
15 |
2008
|
| 7,839,559 Controller and driver features for bi-stable display
|
0 |
2008
|
| 7,787,173 System and method for multi-level brightness in interferometric modulation
|
6 |
2008
|
| 7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof
|
11 |
2009
|
| 7,944,604 Interferometric modulator in transmission mode
|
1 |
2009
|
| 8,270,056 Display device with openings between sub-pixels and method of making same
|
0 |
2009
|
| 7,889,415 Device having a conductive light absorbing mask and method for fabricating same
|
4 |
2009
|
| 8,102,590 Method of manufacturing MEMS devices providing air gap control
|
0 |
2009
|
| 8,081,370 Support structures for electromechanical systems and methods of fabricating the same
|
0 |
2009
|
| 7,952,787 Method of manufacturing MEMS devices providing air gap control
|
0 |
2009
|
| 7,889,417 Electromechanical system having a dielectric movable membrane
|
2 |
2009
|
| 8,405,899 Photonic MEMS and structures
|
0 |
2009
|
| 8,358,266 Light turning device with prismatic light turning features
|
0 |
2009
|
| 8,270,062 Display device with at least one movable stop element
|
0 |
2009
|
| 8,068,269 Microelectromechanical device with spacing layer
|
0 |
2009
|
| 7,920,319 Electromechanical device with optical function separated from mechanical and electrical function
|
0 |
2009
|
| 7,948,671 Apparatus and method for reducing slippage between structures in an interferometric modulator
|
1 |
2009
|
| 7,924,494 Apparatus and method for reducing slippage between structures in an interferometric modulator
|
0 |
2009
|
| 7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
|
0 |
2009
|
| 8,077,379 Interferometric optical display system with broadband characteristics
|
0 |
2009
|
| 8,098,416 Analog interferometric modulator device with electrostatic actuation and release
|
0 |
2010
|
| 8,126,297 MEMS device fabricated on a pre-patterned substrate
|
0 |
2010
|
| 7,852,544 Separable modulator
|
31 |
2010
|
| 8,164,815 MEMS cavity-coating layers and methods
|
0 |
2010
|
| 8,394,656 Method of creating MEMS device cavities by a non-etching process
|
0 |
2010
|
| 8,081,373 Devices and methods for enhancing color shift of interferometric modulators
|
0 |
2010
|
| 8,035,884 Method and device for modulating light with semiconductor substrate
|
0 |
2010
|
| 8,264,763 Controller and driver features for bi-stable display
|
0 |
2010
|
| 8,213,075 Method and device for multistate interferometric light modulation
|
0 |
2010
|
| 8,035,883 Device having a conductive light absorbing mask and method for fabricating same
|
0 |
2011
|
| 8,098,417 Electromechanical system having a dielectric movable membrane
|
0 |
2011
|
| 8,368,997 Electromechanical device with optical function separated from mechanical and electrical function
|
0 |
2011
|
| 8,289,613 Electromechanical device with optical function separated from mechanical and electrical function
|
0 |
2011
|
| 8,174,752 Interferometric modulator in transmission mode
|
0 |
2011
|
| 8,390,547 Conductive bus structure for interferometric modulator array
|
0 |
2011
|
| 8,243,360 Device having a conductive light absorbing mask and method for fabricating same
|
0 |
2011
|
