Method and apparatus for delivering gas
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United States of America Patent
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Jan 17, 1995
Grant Date -
N/A
app pub date -
Jan 8, 1993
filing date -
Jan 8, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Method and apparatus for generating and delivering a gas that contains vapor produced by subliming a solid for use in chemical vapor deposition processes such as Metal Organic Molecular Beam Epitaxy (MOMBE) and Organometallic Vapor Phase Epitaxy (OMVPE). The method includes generating a gas saturated with the vapor and subsequently diluting the gas with an inert gas to obtain an uniform non-saturated gas. The apparatus includes a vessel for containing a sublimable solid, a heater for maintaining the vessel at a desired temperature, tubes and valves for introducing a gas into the vessel and for discharging a gas that is saturated with the vapor of the solid from the vessel, and a tube and a valve for diluting a gas discharged from the vessel.
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