Ceramic-titanium nitride electrostatic chuck
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United States of America Patent
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Jan 17, 1995
Grant Date -
N/A
app pub date -
Jun 3, 1993
filing date -
Jun 26, 1992
priority date (Note) -
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Abstract
Proposed is a ceramic-made electrostatic chuck consisting of two insulating ceramic layers and a metallic electrode layer integrally sandwiched between the two insulating layers, which has a very quick response characteristic to turning-on and -off of the electric voltage applied to the electrodes without affecting the very high electrostatic attracting force. This improvement can be obtained by forming the insulating ceramic layers from a specific ceramic material consisting of a highly resistive ceramic material such as alumina and the like and titanium nitride admixed with the former in an amount not exceeding 5% by weight but sufficient to impart the insulating ceramic layers with a volume resistivity in the range from 1.times.10.sup.8 to 1.times.10.sup.13 ohm.cm at 20.degree. C.
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