Importance

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Abstract

Specimen carrier carousels adapted to support a plurality of specimen carriers in a radial configuration and selectively position specimen carriers at associated processing stations are disclosed. Specimen carriers mounted on the carousel are automatically tilted during rotation of the carousel to properly seat the specimens in their respective carriers and to prevent specimen movement during rotation. Specimen carrier platforms are also disclosed. A scanning assembly is provided in association with a carrier platform or at least one carrier station of a carrier carousel to monitor and verify the orientation of specimens within a carrier prior to commencement of processing operations. A subtilt assembly may be provided to correct the orientation of specimens identified as mispositioned during the scanning operation and to facilitate detection of the presence and location of specimens in a carrier. The specimen carrier carousel is especially suitable for use in connection with the storage, transfer and processing is semiconductor wafer.

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First Claim