Optical pattern projecting apparatus

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United States of America Patent

PATENT NO 5382999
SERIAL NO

08164959

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Abstract

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An optical pattern projecting apparatus comprising a divergent mirror 16 for converting a light beam 13 from a light source 11 into a radially outwardly divergent light beam 13b and a convergent mirror 18 for converting the divergent light beam 13b into a radially inwardly convergent light beam 13d. The convergent light beam 13d is converted by a parallelizing mirror 17 into a parallel zonal ringed light beam 13e which is focused onto a surface of the work piece 15. A polarization beam splitter may be used for deflection-angular polarizing and splitting the light beam into an S-polarized light and a P-polarized light.

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Patent Owner(s)

Patent OwnerAddress
RENESAS ELECTRONICS CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kamon, Kazuya Itami, JP 52 1028

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