Storage capacitor with a conducting oxide electrode for metal-oxide dielectrics

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United States of America Patent

PATENT NO 5383088
SERIAL NO

08103620

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A capacitor having a high dielectric constant and method of making the same is disclosed. The capacitor comprises a bottom electrode comprising a conductive oxide deposited upon a substrate by chemical vapor deposition. A dielectric layer having a high dielectric constant is deposited upon the conductive oxide. Lastly, a counter electrode is formed upon the dielectric layer.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chapple-Sokol, Jonathan D Poughkeepsie, NY 23 1115
Conti, Richard A Mt. Kisco, NY 73 2491
Gambino, Jeffrey P Gaylordsville, CT 531 7337

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