Static megasonic cleaning system for cleaning objects
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United States of America Patent
Stats
-
Jan 24, 1995
Grant Date -
N/A
app pub date -
Jul 16, 1993
filing date -
Jul 16, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A static megasonic cleaning system for cleaning multiple objects having an exterior surface includes a cassetteless vessel having an internal cavity for receiving the multiple objects and an array of megasonic transducers mounted on the vessel. Each transducer emits a focused beam of megasonic energy into the cavity and is arranged so that the emitted beams from all of the transducers collectively envelop the entire exterior surface of the objects. The transducers are staggered to avoid internal mounting structure within the vessel and avoid unnecessary dissipation of the megasonic energy.
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Family
International Classification(s)
Cited Art Landscape
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