Direct load/unload semiconductor wafer cassette apparatus and transfer system

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United States of America Patent

PATENT NO 5387067
SERIAL NO

08004331

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Abstract

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A semiconductor cassetteand transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling means moveable along a first extension axis and second robot handling means moveable along a second extension axis intersecting said first extension axis at an acute angle, and at a predetermined point concurrent with the center of the cassetteas it is disposed in a fixed position within a loadlock chamber of a wafer processing apparatus.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INCAMERICAN CALIFORNIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grunes, Howard E Santa Cruz, CA 21 871

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