Direct load/unload semiconductor wafer cassette apparatus and transfer system
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United States of America Patent
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Feb 7, 1995
Grant Date -
N/A
app pub date -
Jan 14, 1993
filing date -
Jan 14, 1993
priority date (Note) -
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Abstract
A semiconductor cassetteand transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling means moveable along a first extension axis and second robot handling means moveable along a second extension axis intersecting said first extension axis at an acute angle, and at a predetermined point concurrent with the center of the cassetteas it is disposed in a fixed position within a loadlock chamber of a wafer processing apparatus.
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