Steady-state, glow discharge plasma
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United States of America Patent
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Feb 7, 1995
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N/A
app pub date -
May 28, 1993
filing date -
May 28, 1993
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Abstract
A steady-state, glow discharge plasma is generated within the volume between a pair of parallel, insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. The electrodes are located within an enclosure capable of maintaining an atmosphere other than atmospheric air between the electrode surfaces. Space between the electrodes is occupied by a noble gas such as helium, neon, argon, etc. or mixtures thereof.
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