Oxide particles and method for producing them

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United States of America Patent

PATENT NO 5389352
SERIAL NO

08095749

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention is a process for preparing chemically active solid oxide particles useful for polishing, composed primarily of CeO.sub.2, or CeO.sub.2 together with other oxides, comprising: (a) forming an aqueous solution comprised of a water soluble trivalent cerium salt and an oxidizing agent and (b) aging said mixture in the liquid state for a time not less than 4 hours.

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Patent Owner(s)

  • ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Jiun-Fang Piscataway, NJ 25 558

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