Thin film capacitors

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5390072
SERIAL NO

07945891

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to a method for forming a high capacitance thin film capacitor comprising forming an amorphous layer of a dielectric material on the surface of a polycrystalline layer of said dielectric material and arranging the resulting double layer between upper and lower electrodes. The invention further comprises dielectric articles such as capacitors formed in accordance with the method of the invention and includes their use in an electronic circuit.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ROUND ROCK RESEARCH, LLCBOISE, ID3160
THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORKALBANY, NY901

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anderson, Wayne A Hamburg, NY 8 269
Hamilton, Robert S Youngstown, NY 11 273
Jia, Quanxi Buffalo, NY 66 672
Shi, Zhiqing Buffalo, NY 5 58

Cited Art Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
* 4437139 Laser annealed dielectric for dual dielectric capacitor 73 1982
 
Mitsubishi Mining & Cement Co., Ltd. (1)
* 4803591 Dielectric ceramic composition for multilayer capacitor 14 1987
 
SONY CORPORATION (1)
* 4734340 Dielectric thin film 15 1986
 
FREESCALE SEMICONDUCTOR, INC. (2)
* 5173835 Voltage variable capacitor 100 1991
* 5192871 Voltage variable capacitor having amorphous dielectric film 37 1991
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
* 4931897 Method of manufacturing semiconductor capacitive element 34 1989
 
CANON KABUSHIKI KAISHA (1)
* 4873610 Dielectric articles and condensers using the same 24 1989
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
SHARP KABUSHIKI KAISHA (3)
6440591 Ferroelectric thin film coated substrate, producing method thereof and capacitor structure element using thereof 11 1996
* 5757061 Ferroelectric thin film coated substrate, producing method thereof and capacitor structure element using thereof 26 1996
6232167 Method of producing a ferroelectric thin film coated substrate 11 1997
 
Shipley Company, L.L.C. (2)
6819540 Dielectric structure 15 2002
* 2003/0128,496 Dielectric structure 3 2002
 
AVX CORPORATION (1)
* 6832420 Method of manufacturing a thin film capacitor array 13 2002
 
MICRON TECHNOLOGY, INC. (7)
6730559 Capacitors and methods of forming capacitors 4 1998
6891217 Capacitor with discrete dielectric material 2 1999
6773981 Methods of forming capacitors 8 2000
6627508 Method of forming capacitors containing tantalum 7 2000
6995419 Semiconductor constructions having crystalline dielectric layers 2 2004
7166885 Semiconductor devices 0 2005
* 2006/0043,453 Semiconductor devices 0 2005
 
GLOBALFOUNDRIES INC. (4)
6525427 BEOL decoupling capacitor 4 2002
6777809 BEOL decoupling capacitor 3 2002
* 2003/0089,943 BEOL decoupling capacitor 1 2002
* 2004/0195,694 BEOL decoupling capacitor 3 2004
 
SAMSUNG ELECTRONICS CO., LTD. (2)
* 6180482 Method for manufacturing high dielectric capacitor 7 1998
* 6689696 Method for manufacturing semiconductor device employing dielectric layer used to form conductive layer into three dimensional shape 8 2001
 
MURATA MANUFACTURING CO., LTD. (1)
* 6935002 Method of manufacturing a nonreciprocal circuit device 0 2000
 
Pioneer Electronic Corporation (1)
* 5962959 Electron emission device and display device for emitting electrons in response to an applied electric field using the electron emission device 56 1998
 
MOTOROLA, INC. (2)
* 5771148 Intercalation-based voltage variable capacitor 17 1995
* 5986864 Intercalation-based voltage variable capacitor 14 1998
 
THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK (3)
* 5587870 Nanocrystalline layer thin film capacitors 71 1994
* 5978207 Thin film capacitor 69 1997
* 6340621 Thin film capacitor and method of manufacture 12 1999
 
ROUND ROCK RESEARCH, LLC (4)
* 7005695 Integrated circuitry including a capacitor with an amorphous and a crystalline high K capacitor dielectric region 10 2000
6953721 Methods of forming a capacitor with an amorphous and a crystalline high K capacitor dielectric region 6 2001
* 7446363 Capacitor including a percentage of amorphous dielectric material and a percentage of crystalline dielectric material 3 2006
* 2006/0180,844 Integrated circuitry and method of forming a capacitor 0 2006
 
STMICROELECTRONICS (CROLLES 2) SAS (2)
8169771 High-stability thin-film capacitor and method for making the same 0 2007
* 2010/0002,358 HIGH-STABILITY THIN-FILM CAPACITOR AND METHOD FOR MAKING THE SAME 4 2007
 
Ultrasource, Inc. (11)
6761963 Integrated thin film capacitor/inductor/interconnect system and method 21 2001
6998696 Integrated thin film capacitor/inductor/interconnect system and method 8 2003
6890629 Integrated thin film capacitor/inductor/interconnect system and method 10 2003
* 2004/0081,811 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
* 2004/0080,021 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
7327582 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2005/0175,938 Integrated thin film capacitor/inductor/interconnect system and method 3 2005
7425877 Lange coupler system and method 1 2005
* 2005/0162,236 Lange coupler system and method 2 2005
7446388 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2006/0097,344 Integrated thin film capacitor/inductor/interconnect system and method 0 2005
 
TEXAS INSTRUMENTS INCORPORATED (1)
* 6686210 Methods for controlling the crystallographic texture of thin films with anisotropic ferroelectric polarization or permittivity 2 1999
 
HYNIX SEMICONDUCTOR INC. (2)
7498628 Capacitor for a semiconductor device and manufacturing method thereof 1 2005
7741671 Capacitor for a semiconductor device and manufacturing method thereof 2 2009
 
RAYTHEON COMPANY (1)
* 7545625 Electrode for thin film capacitor devices 0 2007
* Cited By Examiner