Method for forming a substantially uniform array of sharp tips
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United States of America Patent
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Feb 21, 1995
Issued Date -
N/A
app pub date -
Jan 21, 1994
filing date -
May 15, 1992
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method for forming a substantially uniform array of atomically sharp emitter tips, comprising: patterning a substrate with a mask, thereby defining an array; isotropically etching the array to form pointed tips; and removing the mask when substantially all of the tips have become sharp. A mask having a composition and dimensions which enable the mask to remain balanced on the apex of the tips until all of the tips are of substantially the same shape is used to form the array of substantially uniform tips.
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