Electron emitting device, method for producing the same and display apparatus and electron beam drawing apparatus utilizing the same
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United States of America Patent
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Feb 21, 1995
Issued Date -
N/A
app pub date -
Dec 21, 1992
filing date -
Sep 7, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electron emitting device with an insulating layer on a substrate. The insulating layer has a hollow part in which a conical electrode is formed. A conductive layer on the insulating layer has an aperture on the hollow part of the insulating layer. The hollow part is formed by etching utilizing an ion beam.
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