Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
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United States of America Patent
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Feb 21, 1995
Issued Date -
N/A
app pub date -
Nov 12, 1992
filing date -
Jun 27, 1991
priority date (Note) -
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Abstract
The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.
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