Method of manufacturing miniaturized components of chemical and biological detection sensors that employ ion-selective membranes, and supports for such components
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United States of America Patent
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Feb 28, 1995
Grant Date -
N/A
app pub date -
Jan 7, 1993
filing date -
May 10, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a process for producing miniaturized chemical and biological sensor elements with ion-selective membranes. To simplify production in the micro range, an aperture (5,6) starting from the front (3) and tapering toward the back (4) is made in a thin silicon substrate (1) so that the front and back are interconnected. A liquid with which the ion-selective membrane is formed is poured into the containment (2) thus formed. Vertical ISFETs may also be made on the above principle.
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