Waveguide type displacement interferometer having two reference paths
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United States of America Patent
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-
Mar 7, 1995
Grant Date -
N/A
app pub date -
Sep 21, 1992
filing date -
Feb 9, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The interferometer comprises a light source, at least one beam splitting means, a beam combiner means, measuring and reference arms as well as wave guides for guiding the light to the beam splitting means and for guiding the light back to photodetectors. Beam splitting means and beam combiner means are formed by integrated optics elements on a substrate. The wave guides on the substrate form a measuring arm (7.sub.1) and two reference arms (6.sub.1, 8.sub.1) which have different optical path lengths for setting a phase difference. An evaluation electronics for determining correct as to signs, the change in optical path length in the measuring arm (7.sub.1) is connected to the photodetectors.
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