Substrate having a built-in capacitor and process for producing the same
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United States of America Patent
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-
Mar 21, 1995
Grant Date -
N/A
app pub date -
Jun 23, 1993
filing date -
Jul 6, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a substrate having built-in capacitor which is incorporated in and united with an insulator, the capacitor has a dielectric layer made of a silicon nitride-based ceramic containing silicon carbide in an amount of from 13 to 30% by weight.
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