Method for forming macroparticle-free DLC films by cathodic arc discharge
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United States of America Patent
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Mar 28, 1995
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N/A
app pub date -
Nov 9, 1993
filing date -
Nov 9, 1993
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Abstract
The present invention provides a method for producing a diamond-like carbon coating. The method comprises the steps of providing a substrate to be coated, providing a cathode of vitreous carbon or a pyrolytic graphite cathode and initiating a cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form a coating on said substrate, said coating being substantially macroparticle free.
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