Alignment system for a Half-Field Dyson projection system

United States of America Patent

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Mar 28, 1995
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N/A
app pub date
Dec 21, 1992
filing date
Dec 21, 1992

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Expired

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Abstract

An alignment system for a unit magnification system (such as a Half-Field Dyson system) for use in microlithography is provided. The alignment system provides for aligning a pattern on a reticle with a complementary pattern on a wafer.

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ULTRATECH STEPPER INC	3050 ZANKER ROAD SAN JOSE CA 95134

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G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....

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Inventor Name	Address	# of filed Patents	Total Citations
Alonzo, Gerald J	Los Gatos, CA	7	39
Jeong, Hwan J	Los Altos, CA	34	679
Markle, David A	Saratoga, CA	73	2112

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Alignment system for a Half-Field Dyson projection system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07993795

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PATENT NO	5402205
SERIAL NO	07993795
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07993795

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