Reflection-free ellipsometry measurement apparatus and method for small sample cells
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United States of America Patent
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Mar 28, 1995
Grant Date -
N/A
app pub date -
Nov 12, 1992
filing date -
Nov 12, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An ellipsometry cell is provided with a transparent lid that is positioned close to a specimen within the cell, thus allowing for a low volume wet chemical treatment of the specimen, and yet prevents interference with the ellipsometry measurements by partial reflections of a probe beam off the outer and inner lid surfaces. This is accomplished by configuring the lid to direct an ellipsometry beam and reflections thereof at different angles, so that the beam but not its reflections enter an ellipsometer analyzer. The lid preferably has an angled outer surface with beam entry and exit windows symmetrically tapering from a central ridge, and its inner surface substantially flat and parallel to the cell base.
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